Synthesis of molybdenum-doped rhenium disulfide alloy using aerosol-assisted chemical vapour deposition

Polycrystalline thin films of molybdenum-doped rhenium disulphide (Mo-doped ReS2) alloys were synthesised by aerosol-assisted chemical vapour deposition (AACVD) using precursor solutions containing (1) [Re(S2CC6H5)(S3CC6H5)2], and (2) [Mo(S2CNEt2)4]. Synthesised characterised powder X-Ray diffraction (p-XRD), Raman spectroscopy, scanning electron microscope (SEM), transmission (TEM), inductively coupled plasma-optical emission spectrometry (ICP-OES) energy dispersive (EDX). The p-XRD shows that interlayer spacing increases with increasing Mo content in the ReS2 matrix, (001) plane becomes broad weak as molybdenum doped films. destruction vibrational modes on a clear shift Eg Ag-like also observed analysis. presence matrix was detected ICP-OES. It final material 7.61 at% compared to initial feed 15 at%. SEM images alloy revealed nano crystal morphology, morphology changed when there an increase portion into structure.